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Key terms:
pump
vacuum
seal
gases
molecules
kpa
outgassing
torr
exhaust
vacuum pump
cavity
high vacuum
evacuated
flanges
suction
atmospheric
boil
ion pump
leakage
throughput
metallic
pumping speed
inlet
coating
low vacuum
gas molecules
positive displacement pump
scroll pump
molecular pumps
residual
adsorbed
diaphragm
barometer
vane pump
momentum transfer pumps
water pump
high speed
vacuum systems
piston pump
rotary vane
entrapment pumps
partial vacuum
diffusion pump
atmospheric pressure
vapour pressure
volume flow rate
parallel circuits
must be considered
pump would be used
exposed to the vacuum
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