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Key terms:
ruthenium
metals
platinum
ruo
cvd
nh
benzene
compounds
oxidation
osmium
mined
rhodium
klaus
precursor
ores
catalyst
residues
fission
isotope
complexes
ligands
palladium
volatile
stain
tumors
toluene
iridium
aqua regia
chlorine
insoluble
catalytic
berzelius
microelectronics
electrodes
platinum group metals
organometallic
surface science
growth rates
work function
decomposition
random access
electroplating
ruthenium tetroxide
dehydrogenation
oxidation state
ruthenium films
osmium tetroxide
ruthenium surfaces
carbon incorporation
chemical vapor deposition
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