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Key terms: sub cvd process deposition chemical silicon gas oxide reactions precursors plasma glass cvd processes temperature silane wafer substrate liquid thermal copper sih sio tungsten teos materials chemical vapor deposition impurities phosphorus vacuum chamber silicon dioxide hydrogen aluminium often used semiconductor silicon nitride metals doping gases pa ics phosphine filament dielectric strength atomic layer manufacturing stress oxygen growth rate epitaxy Search external links cited by footnotes on Wikipedia page Chemical vapor deposition: |
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