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Key terms: cvd process vapor deposition oxide chemical silicon sih reactions glass pa plasma wafer sio silane precursors layer temperature cvd processes ics hcl liquid teos substrate thermal copper metals sinh tungsten gases chamber doping hydrogen impurities vacuum phosphorus stress aluminium epitaxy often used filament phosphine silicon dioxide chemical vapor deposition semiconductor growth rate silicon nitride atomic layer chemical reaction dielectric strength Search external links cited by footnotes on Wikipedia page Chemical vapor deposition: |
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